Multiple layer local oxidation for fabricating semiconductor nanostructures
نویسندگان
چکیده
منابع مشابه
Unconventional Methods for Fabricating and Patterning Nanostructures.
4.1. Nanomachining with Scanning Probes 1831 4.2. Soft Lithography 1832 4.3. Embossing with Rigid Masters 1835 4.4. Near-Field Phase-Shifting Photolithography 1835 4.5. Topographically Directed Photolithography 1837 4.6. Topographically Directed Etching 1837 4.7. Lithography with Neutral Metastable Atoms 1838 4.8. Approaches to Size Reduction 1839 5. Techniques for Making Regular or Simple Patt...
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ژورنال
عنوان ژورنال: Applied Physics Letters
سال: 2004
ISSN: 0003-6951,1077-3118
DOI: 10.1063/1.1809273